The Atlas 3D metrology tool is a modular surface measurement system for quality assurance and process control. Depending on specific needs, different types of 3D sensor technologies can be configured, making it a flexibel tool that allows accurate results at a broad variety of 3D measuring requirements, materials and geometries. Its software supports automation and efficiency in a production environment. Interferometric 3D sensors allow high speed measurements with up to 80,000 points in as few as 130 milliseconds at lateral resolutions down to 4 µm.
- Customized recipes, easy to automate
- Ultra fast measurements
- Wide variety of sensor selections
- Large lateral measurement range
- Flexible data analysis tools
Using sensors with point confocal, line confocal, interferometric or line triangulation technology, its height resolution ranges from 1 nm to 200 µm. The Atlas software solution combines two software tools: a measurement recipe creation tool and a flexible analysis tool. This unique combination is ideal for applications in research and development, failure analysis and low volume semi-automated measurement.
| Sensor Types | Chromatic confocal point sensors Chromatic confocal line sensors White light interferometric sensors Line triangulation sensors |
| Lateral Working Range | up to 400 mm x 400 mm |
| Vertical Working Range | 100 µm to 80 mm |
| Lateral Resoultion | 1 µm up |
| Vertical Resolution | 1 nm up |
| Scope of Delivery | Basis system with axes & controller Sensor accordingly to specification System PC, 19" rack model Solar ScanNT software, Win10 x64 Solar Map data analysis software |
