Slowly replacing the evaluation of 2D profiles, optical 3D surface measurements enable the more informative roughness values of the ISO 25178, determining 3D surface characteristics. The Solarius Polaris 3D inspection provides ideal combination of resolution and speed to meet roughness acquisition requirements.

In order to permanently wet technical surfaces with the right amount of oil or to ensure the adhesion of the correct amount of paint in gravure printing, the incorporation of certain recesses and geometries in surfaces is crucial. Solarius Polaris 3D measurements allow an exact calculation of such void volumes.

Surface textures, in some cases, deliberately have preferred directions in their structuring or it is attempted to avoid them. In both cases, the presence or geometry and character of such textures can be reliably determined by using 3D measurements, made with different Solarius 3D inspection systems.

Transparent surface layers are found in various applications in automotive, semiconductor and medical industry, being created by coating or deposition processes. Function depends on thickness, homogeneity and total thickness variation. The Solarius Polaris systems provide must accurate layer measurement results.

3D particle inspection is most important when stacking functional devices, avoiding piercing of critical layers. Particles are separated from underneath surfaces and become measured in diameter, height and distribution. Contributing high 3D resolution Solarius Polaris inspection tools quickly detect even smallest particles.

Technical surfaces may intentionally and unintentionally have pores which, depending on their size, define the properties of a surface. Such pores can be detected with optical 3D inspection, for example with Solarius Polaris 3D metrology systems, and be measured in lateral and vertical extension and distribution.