Solarius Europe

Fully automatic, FDA 21 CFR compliant 3D wafer inspection for medical technology

In February 2020 already, a 3D wafer inspection system of the new Solarius SIMP process platform was delivered to the German MedTech innovator Boehringer Ingelheim microParts. After the delivery was completed, the tool now is ready for the final validation of productive use. Following the installation of a SECS/GEM integrated 300 millimeter wafer inspection system in Taiwan in December 2019, the completion of this order is another milestone in the strategic direction of the Solarius Group.

Boehringer Ingelheim microParts GmbH manufactures the RESPIMAT® product portfolio at the Dortmund location. The RESPIMAT® is a propellant-free pocket inhaler that has been available in a reusable version since 2019. With a production capacity of 45 million inhalation devices per year, the subsidiary ensures the supply of the global market exclusively for the researching pharmaceutical company Boehringer Ingelheim.

Solarius Europe enables Boehringer Ingelheim microParts to ensure quality assurance and process control through fast, non-contact 3D measurement and inspection technology, thereby setting new standards in accuracy and precision that can be achieved with optical 3D technologies, while at the same time significantly reducing process times. In addition to the high standards of medical technology, Solarius, with nanometer-precise resolution on lateral structures in the single-digit micrometer range, meets previously unattained requirements for process stability in the optical 3D measurement of technical surfaces and structures.

Solarius Europe

Already on May 21, 2019, the Solarius Group received another strategically important order from a top 3 semiconductor foundry for the optical inspection of wafers. Under the terms of the contract, Solarius Europe will supply a fully automated 300 mm wafer inspection system for the manufacture of complex wafer-based optical elements according to international hardware and automatization standards (SEMI, SECS/GEM). The inspection system was designed and provided by Solarius Europe and is installed and maintained by Solarius Asia in Taiwan. With the delivery, Solarius continues to join the semiconductor industry, making the entire technology portfolio available for fully automated 300 mm production environments. The experienced service and support team at Solarius Asia guarantees smooth operation and immediate availability for the customer on site.

EPP Europe 11/2019

Optical inspection for autonomous manufacturing processes - How optical 3D imaging technologies contribute to autonomous manufacturuing requirements, allowing closed quality feedback loops and enhancing productivity. Read our article in the German Magazine EPP Europe 11/2019.

Quality Engineering Plus 01/2019

Nano geometries in 3D - While height measurements in the nanometer range are part of everyday life using confocal 3D measurement technology, lateral structures in the sub-micron range can now be measured with high precision for the first time. A study by Solarius shows how micro-vias are better qualified. Read our article in the German Magazine Quality Engineering Plus 01/2019.