Whenever materials are inserted into the human body, special attention is given to their surface. Besides the compulsory requirement of being sterile, the reaction of the body to the inserted material is of high relevance while this reaction depends on the surface microstructure of the material inserted. Depending on the situation, the aim is to ensure that implants provide ideal surface structure to grow together with bone material or is to provide a surface preventing friction when inserting a catheter. In addition to materials inserted to the body for a short time or remaining there, medical technology also uses microgeometries outside the body for analysis purposes in so called lab-on-chip or micro-fluidic systems. An exact adjustment of surface structures and geometries goes along with powerful 3D metrology, capable of avquiring the critical dimensions, as provided by Solarius.