Slowly replacing the evaluation of 2D profiles, optical 3D surface measurements enable the more informative roughness values of the ISO 25178, determining 3D surface characteristics. The Solarius Polaris 3D inspection provides ideal combination of resolution and speed to meet roughness acquisition requirements.

2D roughness is a well established parameter describing evenness of a surface. Evaluation according to ISO 4287 provides internationally standardized roughness values for the control of technical surfaces. The Solarius Viking is an efficient profilometer to acquire ISO compliant 2D profile data on any surface and material.

Measuring 3D shape of an object is more than just measuring distances and heights. It is the exact determination of continous geometric parameters such as curvature, diameter, angle and texture. The ultra fast Solarius Atlas 3D interferometric sensors allow most robust 3D measurements in only a few milliseconds.

3D particle inspection is most important when stacking functional devices, avoiding piercing of critical layers. Particles are separated from underneath surfaces and become measured in diameter, height and distribution. Contributing high 3D resolution Solarius Polaris inspection tools quickly detect even smallest particles.

Simple 2D distance measurements become complex when dimensions must be acquired at e.g. the bottom of trenches. Measurement of width between two points, lines or planes on complex 3D surface shapes can easliy be done using different Solarius Standard Products, available for individual scopes of application.

Measuring volumes of cavities or bodies goes back to determining 3D topographies in spatial dimensions, mathematically integrating derived measurement data to volumes. Depending on individual speed and accuracy requirements, Solarius Atlas and Polaris 3D inspection tools mark the ideal spead of available functionality.

A surface is said to be straight over a given length, if the variation of the distance of its points from two planes, perpendicular to each other and parallel to the general direction of the line, remains within the specified. Surface straigthness is best measured by using the customizable Solarius AOP system platform.

Differences in height can be measured at two or more "steps" where one of them serves as a reference plane. Step height results can be obtained from either single points, profiles or surfaces. A most cost efficient way to acquire step height data is unsing the Solarius Viking profilometers for 2D and 3D measurements.

Grain analysis is a part of mechanical process engineering linked to materials science. Material property is typically statistically distributed on surfaces. Primary goal of the grain size analysis is the determination of the prevailing particle size distribution. Ideal tools are the Solarius Polaris 3D microscopes.

Flatness is the quality of having a created surface without raised areas or indentations. In metrology, flatness is indicated by tolerance limits defined by two planes, one above and one below the created surface, each parallel. Suitable 3D metrology for this purpose provide Solarius Atlas and Solarius AOP systems.

Transparent surface layers are found in various applications in automotive, semiconductor and medical industry, being created by coating or deposition processes. Function depends on thickness, homogeneity and total thickness variation. The Solarius Polaris systems provide must accurate layer measurement results.

While wire bonding stays a method of choice for heavy duty connections in semicondutors, ball grid arrays (BGAs) are indispensable for 1st and 2nd level interconnects since many years. The arrays are tested for planarity, diameter uniformity, misplacement and missing items by the specialzed SEMI BGA inspection tool.

Waviness determines, in addition to the roughness of a surface, its appearance, especially in paint finishes. For surfaces with mechanical function, the ripple is essential for lifetime and precision of the components. Solarius Atlas 3D measuring systems enable the testing of ripples on different object sizes.

The function of integrated systems depends on the precise positioning of electronic and micromechanical components whose positions must be determined. While with component positioning, the speed of the Solarius Atlas 3D inspection is convincing, in micromechanics, the accuracy of the Polaris systems impresses.

In science and industry nano geometries are often characterized by complex methods such as scanning electron microscopy. Optical 3D measurement techniques such as interferometry or confocal microscopy, available on Solarius Polaris products, provide a much simpler and cost-effective alternative.

Hight-tech devices which are manufactured by stacking of components, such as fuel cells, 3D wafer lavel packages and interposers require very tight thickness tolerance and lowest possible total thickness variation (TTV). Both parameters can reliably be detected using the specialized Solarius AOP Thickness systems.

In order to permanently wet technical surfaces with the right amount of oil or to ensure the adhesion of the correct amount of paint in gravure printing, the incorporation of certain recesses and geometries in surfaces is crucial. Solarius Polaris 3D measurements allow an exact calculation of such void volumes.

Parallelism describes the deviation in the positional relationship of two surfaces. It is understood as the maximum deviation of a plane to another plane, ideally parallel to the reference. Solarius Atlas 3D inspection allows determination of parallelism using confocal sensors, triangulation or interferometry.

Technical surfaces may intentionally and unintentionally have pores which, depending on their size, define the properties of a surface. Such pores can be detected with optical 3D inspection, for example with Solarius Polaris 3D metrology systems, and be measured in lateral and vertical extension and distribution.

Surface textures, in some cases, deliberately have preferred directions in their structuring or it is attempted to avoid them. In both cases, the presence or geometry and character of such textures can be reliably determined by using 3D measurements, made with different Solarius 3D inspection systems.

A defect detection generally searches for errors of a surface or a geometry. These can be scratches, cracks, breakouts, buildup, deposits and other structural defects. The various Solarius 2D and 3D inspection systems quickly and reliably find even the smallest defects on almost all materials.