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Viking

The Viking-C and Viking-T are portable, compact, and robust tabletop solutions for fast QC and off-line 3D measurements.  

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Viking
 

SolarScan AOP

The SolarScan non-contact surface profilometer is a highly accurate and fast 3D laser measurement tool. 

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SolarScan AOP
 

SolarSurf

The SolarSurf optical 3D confocal microscope is combined with a CCD camera to provide user-friendly 3D measurement solutions.

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SolarSurf

SolarView

The SolarView measurement system is a combination of vision and laser technology to perform 3D and 2D surface measurements.

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SolarView

Automated Solutions

Our affordable automated solutions are customer specific and developed based on application and process requirements.

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MEMS : Form and roughness measurements

The task

In the field of MEMS (Micro Electro Mechanical Systems) the transition from development to production is currently taking place. Therefore processes have to more and more be monitored by controlling critical dimensions of MEMS and MOEMS structures. Especially shrinking structure size and high aspect ratio present new challenges for the measuring systems.


The solution

The confocal microscope, SolarSurf, provides non-destructive 3D measurement of MEMS and MOEMS structures. Besides height and width, measurements also include the roughness of the surface. Examples are etched silicon structures, micro gears, micro tools and miniature pumps.


 

mems-optical-switch-produced
Optical switch produced by injection molding measurement with SolarScan
mems-optical-switch
Optical switch, measured with scanning electron microscope
mems-high-aspectratio
High aspect ratio, as shown with the profile of a LIGA spiral
 
mems-micro-lenses1
Form deviation and failure analysis of micro lenses

mems-micro-lenses1
Form deviation and failure analysis of micro lenses

mems-excimer-laser
A 16 level, excimer laser micro machined staircase structure produced in polycarbonate
 
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News and Events

Solarius Development announces introduction of linear motor stages standard on the SolarScan
- June, 2014
Solarius Development announces introduction of a new optical profiler
- October, 2013 SolarSurf Confocal Measuring Microscope
- April, 2014 New SolarMap 7.1 update

Solarius Development