Chromatic White Light Sensor
The principle
Solarius has introduced a new line of chromatic
probes based on white light confocal technology. The use of chromatic "splitting"
allows for sub-division of the white light spectrum to correspond to unique
Z-axis displacement levels. Each wavelength will be perfectly focused at a
different Z height using the confocal principle, all out of focus light is
rejected resulting in only the in-focus point been registered.
The advantages
The use of monochromatic wavelengths to discern
Z height eliminates the need for moving components in the sensor resulting
in a robust extremely accurate solution.
Specifications
| Measurement Range | 300µm | 600µm | 3mm | 6mm | 10mm |
| Working distance [mm] | 4.5 | 6.5 | 20 | 40 | 75 |
| Resolution [nm] | 10 | 20 | 100 | 200 | 300 |
| Accuracy [µm] | 0.1 | 0.2 | 1 | 2 | 3 |
| Spot size [µm] | 5 | 4 | 12 | 16 | 25 |
| Lateral resolution [µm] | 2.5 | 2 | 6 | 8 | 12.5 |
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| The chromatic white light sensor |
