MEMS: Form and roughness measurements

The task
In the field of MEMS (Micro Electro Mechanical Systems) the transition from development to production is currently taking place. Therefore processes have to more and more be monitored by controlling critical dimensions of MEMS and MOEMS structures. Especially shrinking structure size and high aspect ratio present new challenges for the measuring systems.

The solution
The confocal microscope Sensofar provides non-destructive 3D measurement of MEMS and MOEMS structures. Besides height and width, measurements also include the roughness of the surface. Examples are etched silicon structures, micro gears, micro tools and miniature pumps.

Optical switch produced by injection molding Optical switch, measured High aspect ratio, as shown with the profile of a LIGA spiral
Optical switch produced by injection molding, measured with Sensofar
Click here to enlarge		 Optical switch, measured
with scanning electron
microscope		 High aspect ratio,
as shown with the profile
of a LIGA spiral
Form deviation and failure analysis of micro lenses Form deviation and failure analysis of micro lenses A 16 level, excimer laser micromachined staircase structure
Form deviation and failure analysis of micro lenses A 16 level, excimer laser micromachined staircase structure produced in polycarbonate